Traceability for on-wafer CPW S-parameter measurements

Formal quality systems such as the ISO 9000/BS 5750 series standards have created a growing requirement for electrical measurements to be traceable to nationally and internationally certified units such as the SI ohm, watt, and metre. For on-wafer scattering parameter measurement, results are referenced back to fundamental standards via the on-wafer impedance standards used in automatic network analyser (ANA) calibration. This paper describes work at the National Physical Laboratory towards the production of coplanar waveguide (CPW) calibration standards of certified quality on GaAs substrates.<
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