Two-dimensional simulation of silicon avalanche cathodes

The characteristics of silicon avalanche cathode as a novel electron emitting device with ultra-shallow p-n junctions have been studied using the two-dimensional device simulator PISCES-IIB. The steady-state simulation indicates that the nonplanar surface topology resulting from fabrication process causes current crowding near the edge of the emitting area where the surface step exists. Current crowding degrades the emission uniformity and also reduces the emission current under increased reverse bias. The nonplanar surface structure also causes punchthrough in the epitaxial layer as the reverse bias on the cathode increases. As a result, the percentage of the cathode current contributing to emission decreases, reducing the emission efficiency consequently. The simulation shows that the portion of the cathode current that flows through the emitting area drops to as much as 30% at cathode bias higher than 12 V, compared to the same current just after breakdown. This also affects the rate of increase in the total emission current which is the product of the emission efficiency and the overall cathode current.<
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