Manufacturing study of yield and performance dependence on gate length of submicron AlInAs-GaInAs HEMTs

The fabrication, characterization, and statistical analysis of the performance and yield of AlInAs-GaInAs on InP low-noise high electron mobility transistors (HEMTs) with subquarter-micron T-gates fabricated with electron beam lithography are reported. This was undertaken to establish the manufacturability of submicron AlInAs-GaInAs HEMT technology for various low-noise microwave receiver applications. Excellent DC device yield (up to 90%) was obtained from devices to gate widths 300 mu m and 1000 mu m. A range of minimum noise figures between 0.026 to 0.5 dB at 2 GHz and 0.39 to 0.8 dB at 12 GHz were obtained for 0.15- mu m and 0.20- mu m gate length devices. The results establish the correlation between the noise figure and yield for this new class of microwave devices.<
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