Color CCD image sensor

A 2/3 inch interline CCD image sensor for NTSC system with 250000 pixels has been developed. This device adopts buried channel CCD and vertical overflow drain structure for high charge transfer efficiency/low noise and good antiblooming/smear reduction capability respectively. It was fabricated by a double-p-well double-poly double-metal technology, and 1.5 mu m design rule process. Gettering was also applied for dark current reduction. On chip color filter, Y/Cy/G complementary color, checkerboard pattern, was developed for color image sensing.<
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