A high-reliability, low-operation-voltage monolithic active-matrix LCD by using advanced solid-phase-growth technique

A highly reliable poly-Si thin-film transistor (TFT) integrated driver circuit for a monolithic active-matrix LCD (liquid crystal display) panel has been developed. The lifetime of the present driver circuit has been improved to be much longer than that of the conventional driver circuits as a result of the decrease of the supply voltage from 16 V to 8.2 V. This decrease of operation voltage has been attained by the increase of the field effect mobilities to 130 cm/sup 2//V-s for n-channel TFTs and 70 cm/sup 2//V-s for p-channel TFTs by enlarging the grain size of the poly-Si film to 5 mu m. This enlargement of grain size has been achieved by a solid-phase growth technique using a low-temperature LPCVD (low-pressure chemical vapor deposition) method with Si/sub 2/H/sub 6/ source gas.<
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