Electron beam tester integrated into a VLSI tester

An integrated EB (electron-beam) testing system is constructed for precise failure analysis and reduction of total testing time, coupling a VLSI tester and an EB tester. Unique features of the system are briefly described, together with its system configuration and functions. The close connection of LSI testing and EB testing environments is further continued. It is planned to improve the integrated system to enable a simultaneous display of EB testing data in the LSI testing environment, with which it becomes possible to superimpose the EB pin data into the timing chart of normal pin data in the LSI testing. This type of connection of two environments is quite powerful and will be used in a standard testing method.<
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