Precision machine design: macromachine design philosophy and its applicability to the design of micromachines

Macromachine design philosophies that may be of use to micromachining designs are reviewed. Definitions are provided for the precision engineering terms accuracy, repeatability, resolution, and Abbe error. Topics covered include predicting errors to mechanical systems, such as linear motion system errors, axis of rotation errors, and thermal growth errors, as well as issues relating to bearings, position measurement systems, and kinematic and elastically averaged design.<
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