A high-speed TEG evaluation system integrating parallel/continuous processing software and high-speed hardware

At the LSI process development stage, fabrication, and evaluation of a test element group (TEG) are repeatedly carried out to obtain optimum fabrication conditions. A high-speed TEG evaluation system was developed. By combining (1) a high-speed database with suitable indexes formed on a database machine, (2) a means of inputting data in parallel with measurements, and (3) a specialized measurement instrument equipped with an analog feedback unit for high-speed measurement, a fivefold increase in TEG evaluation speed was obtained.<
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