Growth and Hydrogen Sensing Properties Of Carbon Nanotubes Using A MEMS Process

A process for integration of a multiwall carbon nanotubes film with a micro-electro-mechanical system (MEMS) resistive heating device has been developed for implementation of a chemical sensing system. MEMS micro-heaters were designed for use both as a local temperature heating unit to control carbon nanotubes growth and as a pulse heating source for resetting sensors during operation. As an example, hydrogensensing experiments were performed in this device. Room temperature detection down to 100 ppm and sensor recovery time around 60 seconds at 100 °C pulsing heating has been observed.