Nanofabrication with Ultrasonic Nanoimprint Lithography

The ultrasonic nanoimprint lithography method provides high productivity, energy efficiency, and low cost. We propose a new nanoimprint lithography technique based on direct heating of the polymer resist by ultrasonic vibrations instead of using heaters in conventional nanoimprint lithography. In this paper we demonstrate that ultrasonic stack design is very important to ultrasonic nanoimprint lithography system. Since properties of ultrasonic vibrations obviously affect imprint results. If the diameter of the horn is greater than twice times of the size of the mold, the transferred patterns are completely replicated from the mold. To th best imprint results, the imprinted force, ultrasonic power, and ultrasonic time should be adjusted.