Tailored Stress in InP/GaInAs Layers for InP/Air-Gap DBR-Filters with Photonic Crystals

A detailed investigation on the control of residual stresses, especially gradient stress, in InP/air-gap structures is presented. Free standing cantilevers with stress compensation by Ga
_0.03
In
_0.97
P layers of various thicknesses and by a variation of V/III flux ratio in growth direction were fabricated, leading to controlled stress properties. White light interferometry was used for evaluation of the gradient stress values