Characterization of Piston-Tip-Tilt mirror pixels for scalable SLM arrays

We present arrays of electrostatically actuated 64times64 piston-tip-tilt micromirrors realized using a surface micromachining 3-structural-layer polysilicon process. High fill factor, flat mirrors 120 mum in size have mechanical response in the order of 10 mus, with plusmn4 mechanical tip and tilt and 5 mum piston continuous, controllable range under 110 V. The actuator design is based on four dual in-plane comb drives with 0.5 mum critical features size