MEMS Tunable VCSEL with Concave Mirror using the Selective Polishing Method

We have proposed a micromachined tunable vertical cavity surface emitting laser fabricated using the selective polishing method and two chip bonding. The MEMS-VCSEL consists of a micromachined SOI substrate with concave figure and a half VCSEL chip. The MEMS chip and the half VCSEL chip are bonded together with a narrow gap between them using the metal thermo compression bonding method. Wavelength tuning is achieved electrostatically by applying voltage between silicon membrane and silicon substrate. We have obtained wide tuning range without a mode-hop and sidemode suppression are about 32 nm and 40 dB respectively