Analysis Of Spiral Inductor Model In Cmos Circuit

In this paper we analyze the commonly used model of spiral inductor in CMOS circuit. The model and methods for its parameter calculation are presented. The experimental circuit for inductance measurement, designed by authors and produced in CMOS 0.35mum technology, is described. It includes several inductors of different shapes made of metal3 and metal4. The measurement method and results are presented. The measurement results for effective inductances compared to the values calculated from the model are discussed