A MEMS-EDA-methodology Based On Process Management

Today's MEMS-design is frequently supported by EDA-frameworks made for micro electronic circuits or derived from microelectronics frameworks. These frameworks usually do not completely meet the requirements of MEMS design. This is due to the fact that they are optimized to manage huge amounts of devices from a very limited set of device types (management of complexity). However, because of the inherently 3-dimensional-nature of MEMS products, MEMS design requires the application specific forming of the fabrication process to be used (management of technology). This paper first introduces the methodology of "management of technology" and then uses the example of the PROMENADE-framework to demonstrate how this methodology can be utilized to increase MEMS-design productivity