A Novel Magnetic Microdeflector for Electron Beam Control in Electron Beam Microcolumn Systems

A novel micromachined magnetic deflector has been developed for controlling electron beam deflection in an electron beam microcolumn system (EBMCS). The deflector consists of four electromagnetic micropoles which can be controlled by solenoid-type microinductors. They are divided into two pairs which control the deflection of the electron beam in the X- and Y-axes. The microinductor formed by the micromachined solenoid coil has an NiFe magnetic core which produces a highly concentrated magnetic field in the bore area. This magnetic microdeflector has been integrated with an electron beam microcolumn for electron beam control. Experimental results showed that the deflection of the electron beam increased linearly to 100 mum with a driving current of 50 mA and a power consumption of only 2.5 mW. The magnetic deflector demonstrated good performance in controlling the electron beam deflection