High-Energy Electron/Solid State Interaction Modeling with MONSEL

In e-beam tools, interactions between high-energy electrons and the solid target result in backscattering, absorption, and transmission. Each of these effects may be critical to tool performance, affecting resolution, image quality, and even high voltage breakdowns. In most cases, common sense and experience suggest using low-Z materials to minimize backscattering. A more quantitative approach uses MONSEL, a software package capable of modeling e-beam interaction with complex, multi-component, multi-layered 2D and 3D structures, We report on application of MONSEL to common problems found in e-beam lithography tools