Bio-inspired MEMS Resonant Thermal Detector

There are many examples of creatures in the natural world with the ability to sense thermal radiation including pit vipers and fire-seeking beetles. This work has sought inspiration from sensors in the natural world and has investigated a disruptive MEMS-based technology with the potential to achieve high performance uncooled infra red detection at low cost. The novel transduction is based on individual resonant elements changing their frequency with temperature. Devices have been designed and post-processed on standard silicon CMOS substrates in a standard materials set. Measurements of thermal sensitivity are in good agreement with predictions and the device has the potential for 40-60 mK NETD performance.