Design, development and experiments of a high stroke-precision 2DoF (linear-angular) microsystem

This paper presents the design, the development and the experiments on a two degrees of freedom (2DoF) microsystem. The originality of the microsystem is its ability to do angular and linear motions independently with a very high stroke and a submicrometric precision. The target performances are first presented. Afterwards the stick-slip piezoelectric microactuators that are used are presented. Then, their integration inside the microsystem is detailed. Finally, results of experiments are given