IC compatible MEMS technology

This paper deals with an integrated circuits (ICs) compatible MEMS technology, which is used to elaborate an ultra compact RF communication module centered at 24 GHz. This technology uses conventional equipment and is adequate for millimeter wave applications. A compatibility test protocol has consequently been defined in order to check that each technological step does not degrade the SiGe circuits' performances. Finally, the realized demonstrator present a total surface of only 9 mm/sup 2/.