Micromachined Electrode Arrays with Form-Fitting Profile for Auditory Nerve Prostheses

This paper reports the design, fabrication and simulation of a novel micromachined electrode array with a form-fitting profile for use in auditory nerve prostheses. A 10times10 electrode array is created in a 1mm
²
area using bulk micromachining technology. The space between the individual electrodes within the array is filled with a layer of SU-8 molded to conform to the curved surface of the auditory nerve. This layer enables the implant to be secured to the auditory nerve and to have a good sealing between the array and the nerve tissue after insertion. An electrical model for a single electrode is built. Both mechanical and electrochemical finite element analyses (FEA) of the array are also performed