Pulsed multilevel current drive circuitry with LDMOS for monolithic deformable mirror

The electrostatic capacitive microactuator has a critical minimum gap due to potential pull-in and tip-in phenomena. Since constant charge drive permits more stable operation range than constant voltage drive, current drive based on charge drive is attractive owing to its good controllability. Due to quasistatic precondition, a method of pulsed multilevel current drive is adopted to boost the refreshing frequency and charge level. An 80 times 80-actuator array with a refreshing frequency of 10 kHz and an 8-bit charge level is realized with this method