Embedded MEMS filter chip and its fabrication for VHF applications

We developed a clamped-clamped beam micromechanical resonator for actual use in VHF applications. This three-port resonator showed good frequency spectra with a large peak height of 25 dB and a low background level of -77 dB. We designed a parallel beam layout incorporating this resonator for a bandpass filter. Fabricated bandpass filter has a bandwidth of 3.8 MHz at a center frequency of 97 MHz. MEMS filter was embedded in BiCMOS wafers without causing any process damage