Non-charge related mechanism affecting capacitive MEMS switch lifetime

Capacitive microelectromechanical system switches were operated for extended periods of time while tracking the voltages where the beam pulls-in and releases from the insulator surface. Changes in pull-in voltage are explained with charges tunneling from the beam into the insulator. However, charging cannot account for changes in the release voltage which result in switches sticking to the insulator. Pull-in and release voltage measurements provide valuable information on the processes limiting switch lifetime.