Enhanced Characteristics of V0.95W0.05OX-Based Uncooled Microbolometer

In this work, high-performance uncooled microbolometer was fabricated by using vanadium tungsten oxide as a infrared-sensitive material and its bolometric properties was characterized. As a bolometric material, the optimized V
_0.95
W
_0.05
O
_x
thin film has a high TCR value over - 3.0%/K and low noise properties compared with VOx thin film. The fabricated V
_0.95
W
_0.05
O
_x
-based microbolometer was vacuum-packaged and equipped with thermal electric cooler for the measurement of bolometric properties. The TCR value of the fabricated device was -3.49%/K at room temperature resistance of 71 kOmega and the measured thermal conductance was 6.1times10
^-7
W/K. Finally, we obtained high responsivity over 1.8times10
⁴
W/K and high detectivity over 1.3times10
⁹
cmHz
^frac12
/W at a chopper frequency of 10 Hz and a bias current of 7.4 muA