Experimental evaluation of a control system for an absolute angle measuring micromachined gyroscope

This work presents the experimental implementation and evaluation of a feedback control system for compensation of energy dissipation and suppression of anisoelasticity based errors in a micromachined absolute angle measuring gyroscope. The control system was implemented with a high speed, real time DSP board using MATLAB Simulink code downloaded onto the board. A single crystal silicon prototype was fabricated and used as a test bed. Experimental results demonstrated that the control system maintains the gyroscope motion at a defined energy level with some steady state error while simultaneously reducing anisoelasticity induced angular momentum by 31%