Development of double-sided silicon strip position sensor

Since double-sided silicon strip sensor provides two-dimensional position information with high resolution, it has been developed in various areas for medical imaging sensor, radiation detector, sensing detector in space science and silicon vertexing/tracking detector in experimental particle physics. We designed and fabricated the double-sided silicon position sensor in 5-inch fabrication line. We present measurement results of electrical characteristics of the sensor such as leakage currents and capacitances as function of bias voltages. We also performed beta source test with /sup 90/Sr radioactive source and tested the radiation damage of fabricated sensors with 35 MeV proton beam. The charge collection efficiencies for different sensor designs were measured with laser scanning method.