Indium phosphide MEMS for integrated bio-sensing

We present a MEMS cantilever resonator sensing platform in InP utilizing an optical readout scheme for applications in biosensing. Devices with resonant frequencies as high as 1 MHz are demonstrated with Q factors of ~160 in air and calculated mass sensitivities as high as Deltam/Deltaf= 4.5 times 10
^-16
g/Hz