Parasitics extraction involving 3-D conductors based on multi-layered Green's function

An efficient algorithm for three-dimensional (3-D) capacitance extraction on multi-layered and lossy substrate is presented. The new algorithm represents a major improvement over the quasi-3D approach used in Green's function-based solvers by taking into consideration of the side-wall effects of the conductors. The accuracy and efficiency of the new algorithm is tested by examples.