Novel ITO alloy for microwave and optical applications

This study presents the analysis of an innovative alloy made of indium tin oxide sputtered in a reducing atmosphere of argon-nitrogen gas. The physical properties are first studied with the crystallographic analysis and with the optical transmission of the layer. Then the electrical properties of the new ITO in DC analysis are compared to the classical ITO alloy. Finally an antenna is manufactured to estimate the radiofrequency performances by the measurement of the absolute gain of a patch antenna in which a thick layer is tested thanks to the new alloy properties