Monolithic Integration of Balanced Traveling-Wave Photodetectors with Polymer Optical Waveguide

We have designed and fabricated monolithic balanced distributed traveling-wave metal-semiconductor-metal (MSM) photodetectors with polymer optical waveguides. We successfully demonstrated the monolithic integration of distributed traveling-wave photodetectors with polymer optical waveguides for balanced detection applications. A responsivity of 0.44 A/W and a 3 dB bandwidth of 10 GHz were measured in the devices.