MOEMS Reflective Type Variable Optical Attenuator

A reflective type VOA is demonstrated in this paper. The VOA MOEMS device comprises two parts, electrode and mirror, and bonding by solder. The mirror part is made by SOI wafer to get excellent reflective plane. This VOA operates below at 1OV for 45dB attenuation with good optical performance, low insertion loss, low PDL 0.2dB@15dB, and low WDL 0.7dB@15dB.