Generalized Comprehensive Approach for Robust Three-Dimensional Mesh Generation for TCAD

To overcome the difficulties in three-dimensional mesh generation for TCAD the advancing front Delaunay mesh generation method [1] was generalized by means of a set of meshing rules. A solid modeling language based on the needs of modern TCAD applications, and a mesh optimization based on a fuzzy classification scheme for the degree of degeneracy of elements have been developed and are ready for use. The applicability and results obtained from our generalized comprehensive approach are presented.