Heterogeneous integration of microdisk lasers on silicon strip waveguides for optical interconnects

A new approach is proposed to realize an optical link for intrachip optical interconnects. This link includes III-V compound-based laser sources and photodetectors, and silicon-on-insulator-based strip waveguides. The heterogeneous integration of an InP-based microdisk laser with a silicon waveguide using SiO/sub 2/-SiO/sub 2/ molecular bonding and nanofabrication procedures is emphasized. The technological procedure is described and first experimental results show that, with an adequate configuration, 35% of light could be coupled from the optically pumped microlaser to the waveguide, as a result of the vertical evanescent coupling.