Integrated polymeric Mach Zehnder interferometer for biosensing applications

A relatively new and simple way to realize integrated optical waveguides is to use polymeric materials. We propose an integrated optical biosensor based on negative photoresist SU-8 and positive photoresist. A Mach-Zehnder architecture was chosen for the sensor. Design, simulations, using Opti-FDTD software tools and preliminary fabrication experiments were presented.