Next generation pixel scaling for the digital micromirror device

Digital light processing (DLP/spl trade/) technology, is the leader in the microdisplay market using the digital micromirror device (DMD) technology. As the market for display resolution and performance grows, our strategy is focusing on decreasing the pixel pitch for the latest high resolution devices. This paper presents the issues that are associated with shrinking the micromirror and actuation circuitry, as well as design and process techniques that are used to overcome the scaling requirements. Simulation results illustrate the ability of the next generation DMD to meet these scaling requirements to overcome the electrostatic, mechanical, and optical constraints at the smaller pixel pitch.