24 GHz differential integrated antennas in 10 /spl Omega/-cm bulk silicon

We have demonstrated high performance, low cost, 24 GHz differential antennas on lossy 10 /spl Omega/ Si using compatible copper metallization post-processing. A gain of -8 dBi and favorable differential impedances (<50 /spl Omega/) are obtained. These antennas have strong potential for integration into VLSI technology to implement single-chip wireless systems for short range communication applications.