Demonstration of a low-voltage resonant modulator based on the folded cavity design

A low-voltage folded cavity resonant modulator, based on shallow-etched ridge waveguides combined with four deeply etched turning mirrors is demonstrated. The resonant modulator exhibit a high quality factor in the excess of 5000, low insertion loss, greater than 22 dB extinction at resonance and offers low-voltage operation. A change in the applied voltage by 0.7 V leads to transmission change of more than 16 dB. The DC performance of the modulator is presented