Single-chip 16-ch variable attenuator multiplexer (V-AWG) with stacked PD-array using integrated micro-mirrors on PLC

We have developed a variable optical attenuator AWG multiplexer (V-AWG) integrated on a single planar light-wave circuit (PLC) chip. We successfully employed a stacked structure using micro-mirrors formed on the PLC to integrate monitor photodiodes (PDs) and achieved a low transmission loss of 5.5 dB and a high PD responsivity of better than 0.9 A/W