Modelling surface-micromachined electrothermal actuators

A method for the accurate simulation of electrothermal actuators is presented. The model accounts for variations in material parameters that occur over the temperature range at which polysilicon electrothermal actuators are operated. The paper then presents the steps necessary to perform a sequential electrothermal-mechanical analysis using ANSYS modelling software. The model is compared against actuators fabricated using a surface-micromachining process called MUMPs. The literature concerning thematerial parameters associated with this process that are necessary for the simulation is reviewed.