Towards Batch Fabrication of Carbon Nanotube Sensors by Combining Microinjection and Dielectrophoretic Manipulation

We present the preliminary design and test results of a novel automated carbon nanotube (CNT) microinjection system for batch fabrication of a bulk multi-walled carbon nanotubes (MWNT) based sensors. This project will eventually develop an automated system to rapidly and precisely execute the AC electrophoretic manipulation of MWNT bundles on substrates that are used to fabricate nano-sensors. We have already shown that, using dielectrophoretic manipulation, CNTs were successfully and repeatably manipulated between micro-fabricated electrodes. The CNT devices were demonstrated to potentially serve as novel thermal sensors with low power consumption (~muW) and electronic circuit response of about 100 kHz in constant current mode operation. Besides, preliminary microinjection experiments were conducted which demonstrated the possibility of the automated microinjection of solution with spot size of ~200mum. Based on these experimental evidences, a feasible batch fabrication method for functional CNT sensors by using an automated injection system is under development. The system will ultimately reduce fabrication accuracy and time of nano sensing devices and potentially enable fully automated assembly of CNT and other nano-wire based devices