FePt fct phase ordered alloy thin film prepared by 30-s annealing with fe-o under-layer

Fe-O under-layers formed by reactive sputtering with oxygen were applied as under-layers for c-axis orientation control of FePt ordered alloy thin films. Short time annealing for 30 seconds, using an infrared lamp heater was applied. The FePt ordered alloy thin films with Fe-O under-layers after annealing exhibited excellent perpendicular magnetic properties, high perpendicular anisotropy, highly ordered fct-FePt alloy phase and high c-axis orientation.