TLP systems with combined 50- and 500-/spl Omega/ impedance probes and Kelvin probes

Transmission line pulse (TLP) systems are mainly classified by their impedance, such as a 50- or 500-/spl Omega/ current source. A new TLP configuration allows switching between 50 and 500 /spl Omega/ by computer control to characterize a given part using both impedances. In addition, a four-needle Kelvin technique is introduced to TLP, which overcomes the measurement error from variations in contact resistance where the probe needles contact the wafer surface.