Modeling and numerical simulation of a MEMS pneumatic valve

This paper presents the working behaviour of a novel microfluidic silicon valve developed by the authors. The design and fabrication process in MEMS technology are also described. The mathematical model and finite-element simulation of fluid and solid interaction within the valve are presented. They are needed in order to obtain the flow characteristic of the device. This characteristic, obtained from the mathematical model and from the numerical simulation, are compared with the experimental one.