On the use of titanium nitride as structural material for nano-electro-mechanical systems (NEMS)

The introduction of new multifunctional materials provides the potential for expanding the realm of microsystems device design and applications. Titanium nitride is identified as an attractive candidate material for use in NEMS applications given its favorable electrical, mechanical and chemical properties thereby enabling its use in high frequency applications and in harsh environments. We demonstrate TiN NEMS structures and low temperature residual stress control of the TiN comprising those structures. Potential applications of TiN as a NEMS structural material are discussed, with particular emphasis on active nanophotonic devices.