A 90nm generation NOR flash multilevel cell (MLC) with 0.44/spl mu/m/sup 2//bit cell size

A 256Mb NOR MLC flash memory with 90nm technology has been successfully developed. Through judicious integration to control the cell dispersion and charge loss/gain with cycling, we confirm a successful MLC operation up to 10K cycling for 0.44 /spl mu/m/sup 2//bit cell size. In this paper, the key features governing multilevel cell (MLC) operation below 90nm technology node is discussed with experimental results.