Fishbone-shaped vertical comb actuator for dual-axis 1D analog micromirror array

We have developed a bulk-micromirror with a high fill-factor using a simple process. By using an asymmetrical mirror structure, a newly designed "fishbone-shaped" vertical comb actuator, and a new mirror frame that enables a narrow pitch, we developed a dual-axis micromirror array with the narrow pitch of 250 microns and high fill-factor of 80%. The fabricated micromirror provides a large rotation angle, for example, 6/spl deg/ for the X axis and 2/spl deg/ at 200 V for the Y axis. The resonance frequencies for both axes are approximately 3 kHz.