Development of monolithic PZT microstage for the application of ultra high-density data storage

The paper presents the fabrication and characterizations of a compact PZT actuated microstage with multi degrees of freedom (DOFs). The entire device is fabricated in a symmetrical arrangement from a monolithic PZT plate of size 15/spl times/15/spl times/0.8 mm/sup 3/. Displacement amplification mechanisms are integrated in the structure to increase the stroke of the PZT actuator. The performances of the displacement and the resonant frequencies are simulated using a finite element method (FEM). Simulation results show the possibility of achieving a displacement of 8 /spl mu/m in x- and y-axes and 10 /spl mu/m in z-axis under the applied voltage of 100 V. A prototype has been fabricated and evaluated. The FEM simulation and experimental results are compared.