A single photon detector array with 64/spl times/64 resolution and millimetric depth accuracy for 3D imaging

An avalanche photodiode array uses single-photon counting to perform time-of-flight range-finding on a scene uniformly hit by 100ps 250mW uncollimated laser pulses. The 32/spl times/32 pixel sensor, fabricated in a 0.8 /spl mu/m CMOS process uses a microscanner package to enhance the effective resolution in the application to 64/spl times/64 pixels. The application achieves a measurement depth resolution of 1.3mm to a depth of 3.75m.