An object-oriented material-property database architecture for microelectromechanical CAD

The authors report on the implementation of an object-oriented database for capturing the process dependence of material properties of microelectronic materials. The database is a component of the MIT MEMCAD system, but will also be useful as a stand-alone module. It can accept data in several different forms: individual numbers; tables; and an algebraic function expressing the dependence of the material property on process conditions. The architecture and operation of the database are illustrated with the example of the temperature and gas-flow dependence of the residual stress in LPCVD (low-pressure chemical vapor deposited) silicon nitride.<
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